Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Product Type

Housings, Vessels, and Assemblies

BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
Unit of Measure
1/EA
Min Order Qty
1
HOUSING ALTA06M67535 product photo

HOUSING ALTA06M67535

Product ID: ALTA06M67535
Unit of Measure
1/EA
Min Order Qty
1
LH1-H product photo

LH1-H

Product ID: LH1H
Unit of Measure
1/EA
Min Order Qty
1
IDL11GN16H product photo

IDL11GN16H

Product ID: IDL11GN16H
Unit of Measure
1/EA
Min Order Qty
1
SHELL ASSY LMOVS20S product photo

SHELL ASSY LMOVS20S

Product ID: SHELLASSYLMOVS20S
Unit of Measure
1/EA
Min Order Qty
1

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VP4-3/4-222 product photo

VP4-3/4-222

Product ID: VP434222
Unit of Measure
1/EA
Min Order Qty
1
6 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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