Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Pleated Filters

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Filter Cartridge Style

Code 7

HDC® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, silicone

Product ID: AB3J1007H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3J0067H4
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Oenopure™ Filter Cartridges, AB3GB7WH4

Product ID: AB3GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
1.8 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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This product is currently not available. Please contact us for more information.

Emflon® HTPFRW Filter Cartridges, AB3HTPFR7WH4

Product ID: AB3HTPFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
25200 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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HDC® II, Filter Cartridges, Removal Rating 1.2 μm, Length 30 Inches, Ethylene Propylene

Product ID: AB3J0127J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Removal Rating 6 μm, Length 30 Inches, silicone

Product ID: AB3J0607H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
6 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Fuente II Filter Cartridge, AB3FFN7WH4

Product ID: AB3FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Effective Filtration Area (Metric m²)
3.12 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Ultipor® N66 Filter Cartridges, AB3NB7WH4

Product ID: AB3NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U030Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Emflon® PFRW Filter Cartridges, AB3PFR7WH4

Product ID: AB3PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric m²)
2.4 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Supor® Beverage Filter Cartridges, AB3SBB7WH4

Product ID: AB3SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
PES
Effective Filtration Area (Metric m²)
2.31 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U220Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes
24 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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