Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

5 in

Product Use

Pre-Filtration

NXA 0.5-5U product photo

Nexis, NXA, 0.5 μm, 12.7 cm (5 in), DOE industrial (no end caps)

Product ID: NXA055U
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 5 inches

Product ID: NXT15U
Unit of Measure
60/EA
Min Order Qty
60
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 5 inches

Product ID: NXT205U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches

Product ID: NXT505U
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 5 Inches, SOE internal O-ring closed end with deep recess

Product ID: PFT025USM20
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Highly Asymetric Polysulfone
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 Inches

Product ID: PFT55UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
7 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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