Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo
Product ID: CLR510
Unit of Measure
36/EA
Min Order Qty
36
Micron
5 micron
Length
25.4 cm / 10 in
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches product photo
Product ID: CLR5030
Unit of Measure
12/EA
Min Order Qty
12
Micron
50 micron
Length
76.2 cm / 30 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo
Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
99.1 cm / 39 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo
Product ID: CLR52925
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
74.3 cm / 29.25 in
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches product photo
Product ID: NXT20020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
200 micron
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Product ID: PFT02520UFM3414
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.25 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
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Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches product photo
Product ID: CLR5020
Unit of Measure
24/EA
Min Order Qty
24
Micron
50 micron
Length
50.8 cm / 20 in
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo
Product ID: NXA120U
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
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Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo
Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo
Product ID: NXT520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches product photo
Product ID: NXT120U
Unit of Measure
10/EA
Min Order Qty
10
Micron
1 micron
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo
Product ID: NXA0520UM3V
Unit of Measure
24/EA
Min Order Qty
24
Micron
0.5 micron
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68 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets