Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

Profile® Star membrane in Mini Profile® capsules, 5 µm removal rating, 90 cm² EFA, ½ in hose barb connections, box of 3 product photo

Profile® Star membrane in Mini Profile® capsules, 5 µm removal rating, 90 cm² EFA, ½ in hose barb connections, box of 3

Product ID: BYA050P6
Unit of Measure
1/BOX
Min Order Qty
1
Effective Filtration Area (Metric)
90 cm²
Membrane Material
Polypropylene
See All Attributes
Profile® II depth filter in Mini Profile® capsules, 0.5 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3 product photo

Profile® II depth filter in Mini Profile® capsules, 0.5 µm removal rating, 46 cm² EFA, ½ in hose barb connections, box of 3

Product ID: BYY005P6
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
46 cm²
Membrane Material
Polypropylene
See All Attributes
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 19.5 inches

Product ID: CLR30195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
30 micron
CLR 30-10 product photo

30um, 10", DOE

Product ID: CLR3010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches

Product ID: CLR3039
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: CLR30975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: CLR340
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches

Product ID: CLR5010
Unit of Measure
36/EA
Min Order Qty
36
Length
102 cm / 40 in
Micron
50 micron
Claris, Polypropylene, 50 micron, 29.25 inch product photo

Claris, Polypropylene, 50 micron, 29.25 inch

Product ID: CLR502925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches

Product ID: CLR5040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches

Product ID: CLR5030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
50 micron
182 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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