Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Unit of Measure
24/EA
Min Order Qty
24
Micron
0.5 micron
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NXA 0.5-20U-M3E product photo

Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches product photo
Product ID: NXA05975UH21

Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches product photo
Product ID: CLR20975

Unit of Measure
36/EA
Min Order Qty
36
Micron
20 micron
Length
24.8 cm / 9.75 in

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo
Product ID: CLR75975

Unit of Measure
36/EA
Min Order Qty
36
Micron
75 micron
Length
24.8 cm / 9.75 in

NXA1030U product photo
Product ID: NXA1030U

Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo
Product ID: NXT0530U

Unit of Measure
10/EA
Min Order Qty
10
Micron
0.5 micron
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo
Product ID: NXT0510U

Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo
Product ID: NXT1020UH21

Unit of Measure
10/EA
Min Order Qty
10
Micron
10 micron
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches product photo
Product ID: NXT1020U

Unit of Measure
10/EA
Min Order Qty
10
Micron
10 micron
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets