Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 30 Inches, 316 stainless steel

Product ID: C001AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core

Product ID: C001AW30SEC1S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches

Product ID: C001AW30SNM3S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel

Product ID: C001AW30T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C003AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 304 stainless steel, Bulk packaging

Product ID: C003AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Core Cover, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Core Cover, Individually wrapped

Product ID: C005AW30AC1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel,  Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, Bulk packaging

Product ID: C005AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Core Cover

Product ID: C005AW30SC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, Polypropylene, Bulk packaging

Product ID: C005AW30U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: C005AW30ACEC1A
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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