Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

60 in

Filter Grade

1 µm

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP001PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring, Acetal caps Hardware

Product ID: HFV660PP001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PP001PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM160UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, EPDM

Product ID: RPF009UY660S0010E
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Fluorocarbon

Product ID: RPF009UY660S0010V
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches, Nitrile

Product ID: RPF009UY660S0010N
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Pall Fit 3M Retrofit Large Format Filters, Removal Rating 1 μm, Length 60 inches

Product ID: RPF009UY660S0010S
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Cartridge Length (Imperial)
60 in
Cartridge Length (Metric)
1524 mm

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 60 inches

Product ID: HFV660PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM160UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 1 µm, polypropylene, Length 60 Inches, Nitrile O-ring

Product ID: PFTM160UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
11 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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