Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

1 µm

Cartridge Length (Metric)

228.6 mm

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 9 inches, Fluoropolymer elastomer O-ring

Product ID: HFV609PE001AH
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 9 inches

Product ID: HFV609PE001AH13
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
2 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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