Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Element Series

HC9600

Ultipor III Wire Mesh 50 micron Nitrile 13in 33.02cm

Product ID: HC9600EOM13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
13 in
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Ultipor III Wire Mesh 25 micron Nitrile 8in 20.32cm length

Product ID: HC9600EOJ8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
8 in
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Ultipor III Wire Mesh 50 micron Nitrile 8in 20.32cm

Product ID: HC9600EOM8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 65 micron Fluorocarbon 13in 33.02cm

Product ID: HC9600EOR13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
13 in
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
13 in
See All Attributes

Ultipor III Wire Mesh 65 micron Nitrile 16in 40.64cm length

Product ID: HC9600EOR16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
65 µm
Nominal Length (Imperial)
16 in
See All Attributes

Ultipor III Wire Mesh 50 micron Fluorocarbon 8in 20.32cm length

Product ID: HC9600EOM8Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
50 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS4H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
4 in
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Ultipor III Wire Mesh 100 micron Nitrile 8in 20.32cm

Product ID: HC9600EOS8H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
8 in
See All Attributes

Ultipor III Wire Mesh 225 micron Fluorocarbon 13in 33.02cm

Product ID: HC9600EOT13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
225 µm
Nominal Length (Imperial)
13 in
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm

Product ID: HC9600FAN4H
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes
112 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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