Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

1.5 µm

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, No flange

Product ID: DFNM152UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1.5 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag

Product ID: DFNM152UNFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1.5 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Borosilicate micro fiberglass with acrylic binder, Size 2 bag, Fluorocarbon elastomer

Product ID: DFNM152UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1.5 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™ High Flow, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Length 20 Inches

Product ID: XLDM1520UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
1.5 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
20 in
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Marksman™ High Flow, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Length 40 Inches

Product ID: XLDM1540UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
1.5 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
40 in
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Marksman™ High Flow, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: XLDM1560UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1.5 µm
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
Cartridge Length (Imperial)
60 in
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6 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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