Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

10 in

Product Type

Filter Cartridges

Gasket / O-Ring Material

Silicone

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA110UM7S
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone

Product ID: ARD510USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: CLR110M3S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR110M7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR510DOES
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR510M7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA0510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 1-10U-M3S product photo

Nexis, NXA, 1 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), Silicone gasket

Product ID: NXA110UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA2010UM7S
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
See All Attributes
NXA 40-10U-M7S product photo

Nexis, NXA, 40 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA4010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 micron
30 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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