Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

Filter Media

Polypropylene

Product ID: AB4Y0057WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Maximum Differential Pressure
4 bard @ < 30° C (86◦ F)
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches product photo
Product ID: CLR510
Unit of Measure
36/EA
Min Order Qty
36
Micron
5 micron
Length
25.4 cm / 10 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches product photo
Product ID: CLR520
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Length
50.8 cm / 20 in
Product ID: CLR530H21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Product ID: CLR530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches product photo
Product ID: CLR52925
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
74.3 cm / 29.25 in
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo
Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
99.1 cm / 39 in
Product ID: CLR540M8N
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Discontinued
Product ID: CLR540M3HN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo
Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Micron
75 micron
Length
24.8 cm / 9.75 in
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches product photo
Product ID: CLR7540
Unit of Measure
12/EA
Min Order Qty
12
Micron
75 micron
Length
102 cm / 40 in
97 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets