Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Air, Gas, and Vent Filtration

Claris® Filter Cartridge, CLR1010W480

Product ID: CLR1010W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches

Product ID: CLR10195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: CLR102925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches

Product ID: CLR1020
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: CLR1030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
10 micron
Claris, Polypropylene, 10 micron, 9.75 inch product photo

Claris, Polypropylene, 10 micron, 9.75 inch

Product ID: CLR10975
Unit of Measure
1/EA
Min Order Qty
1
Length
24.8 cm / 9.75 in
Micron
10 micron
Claris, Polypropylene, 1 micron, 29.5 inch product photo

Claris, Polypropylene, 1 micron, 29.5 inch

Product ID: CLR1295
Unit of Measure
1/EA
Min Order Qty
1
Length
74.9 cm / 29.5 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.75 inches

Product ID: CLR12975
Unit of Measure
24/EA
Min Order Qty
24
Length
75.6 cm / 29.75 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR130
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches

Product ID: CLR140
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches

Product ID: CLR2010
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
20 micron
26 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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