Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Gasket / O-Ring Material

EPDM

Product Use

Pre-Filtration

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT3040UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA1030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA2010UDOEE
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, EPDM

Product ID: NXA2040UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT0510UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT1010UM8E
Unit of Measure
60/EA
Min Order Qty
60
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT110UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT5030UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
50 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT0210UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT0210UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT0210UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT0210UEM3
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.2 µm
139 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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