Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, 304 stainless steel, Bulk packaging

Product ID: GU010A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
GW005A40SE-1PK 246 product photo

GW005A40SE-1PK 246

Product ID: GW005A40SE1PK246
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
GW005A20SE-1PK 246 product photo

GW005A20SE-1PK 246

Product ID: GW005A20SE1PK246
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
GW010A39.5SE-1PK 246 product photo

GW010A39.5SE-1PK 246

Product ID: GW010A395SE1PK246
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
GW025A20SE-1PK 246 product photo

GW025A20SE-1PK 246

Product ID: GW025A20SE1PK246
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT04520USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard
E001AW30S product photo

E001AW30S

Product ID: E001AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches

Product ID: E005AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
E005AW20A1PK product photo

E005AW20A-1PK

Product ID: E005AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 40 Inches

Product ID: E010DW40S
Unit of Measure
12/EA
Min Order Qty
12
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 30 Inches

Product ID: F001AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 304 stainless steel

Product ID: F001AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
634 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English