Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N050AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: U020AW30AEC1A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches

Product ID: CLR13042
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel

Product ID: G003AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 30 Inches, 316 stainless steel, with Core Cover

Product ID: C05AW30SC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C010AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G020AW30SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA0530UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C050AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT0830UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings

Product ID: NXT1030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT2530U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
185 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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