Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Cartridge Length (Metric)

1016 mm

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches, silicone

Product ID: NXA340UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: PFT1040UNM18
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 40 inches

Product ID: NXA7040U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Nitrile, product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Nitrile,

Product ID: PFT540UNSI
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT04540USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT1040USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
See All Attributes
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: CLR340
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
3 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT0840UEM7
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II Filter Cartridge, PFT04540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04540USM7W480

Product ID: PFT04540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.45 µm
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT540UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA140UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
232 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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