Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Cartridge Length (Metric)

749 mm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 29.5 Inches, silicone product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 29.5 Inches, silicone

Product ID: PFT045295US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel

Product ID: NC010AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.5 inches

Product ID: CLR20295
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
NA
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Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN045295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFNT02295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 29.5 Inches

Product ID: F020RW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 29.5 Inches, Polypropylene

Product ID: U005AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, Polypropylene

Product ID: U010AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 29.5 Inches, 304 stainless steel

Product ID: U020AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 29.5 Inches, Polypropylene

Product ID: U100AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 29.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 29.5 Inches, Polypropylene

Product ID: U200AW295U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel

Product ID: G001AW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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