Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Gasket / O-Ring Material

Silicone Elastomer

Filter Media

Polypropylene

Poly-Fine® II Filter Cartridge, PFT04540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04540USM7W480

Product ID: PFT04540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04530USM7W480

Product ID: PFT04530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT1030USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1030USM7W480

Product ID: PFT1030USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Claris® Filter Cartridge, 1 µm, 30 in, Single Open End with Fin End, 2 Locking Tabs and External 226 O-rings

Product ID: CLR130M7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 40 Inches, Silicone Elastomer, SOE – single open end with fin end and external 222 O-rings

Product ID: PFT02540USM8W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT0810USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0810USM7W480

Product ID: PFT0810USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm

Nexis® T Series Filter Cartridges, Polypropylene, 10 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT1030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm

Profile® UP Filter Cartridges, 10 in, 10µm, Silicone Elastomer

Product ID: AB1UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
PolyFine-II Filter Cartridge, Polyproylene, 3 µm, 30 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 3 µm, 30 in, Silicone Elastomer, M8

Product ID: PFT330USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II Filter Cartridge, PFT330USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT330USM7W480

Product ID: PFT330USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm

Nexis® T Series Filter Cartridges, Polypropylene, 50 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT5030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
43 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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