Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Availability

In Stock

Product Use

Pre-Filtration

CLR540 product photo
Product ID: CLR540
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Length
102 cm / 40 in
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches product photo
Product ID: CLR7540
Unit of Measure
12/EA
Min Order Qty
12
Micron
75 micron
Length
102 cm / 40 in
Product ID: PFT3010UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
30 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
See All Attributes
CLR 30-10 product photo
Product ID: CLR3010
Unit of Measure
36/EA
Min Order Qty
36
Micron
30 micron
Length
25.4 cm / 10 in
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches product photo
Product ID: NXT10010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
100 micron
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches product photo
Product ID: NXT120U
Unit of Measure
10/EA
Min Order Qty
10
Micron
1 micron
See All Attributes
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo
Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Length
76.2 cm / 30 in
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo
Product ID: NXT530UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo
Product ID: NXT0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
See All Attributes
9 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets