Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Nylon

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 40 Inches

Product ID: N010AW40SC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N010AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon, Length 40 Inches

Product ID: RGN4FN050
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1020 mm
Cartridge Length (Metric)
102 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches

Product ID: N001A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 30 Inches

Product ID: RGN3FN700
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 40 Inches

Product ID: RGN4FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1020 mm
Cartridge Length (Metric)
102 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Nylon, Length 30 Inches

Product ID: RGN3FN150
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
15 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 20 Inches

Product ID: RGN2FN700
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 10 Inches

Product ID: RGN1FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 30 Inches, 316 stainless steel

Product ID: N010AW30SEC1S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 20 Inches

Product ID: RGN2FN400NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N050AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
44 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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