Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

30" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGT30Z
Unit of Measure
12/EA
Min Order Qty
12

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGT20Z
Unit of Measure
12/EA
Min Order Qty
12

LP6F

Product ID: LP6F
Unit of Measure
4/EA
Min Order Qty
4

ME3310CPG13H 132

Product ID: ME3310CPG13H132
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPR13H 132

Product ID: ME3310CPR13H132
Unit of Measure
60/EA
Min Order Qty
60

Profile® II Filter Cartridge

Product ID: ME3310FPN30H
Unit of Measure
24/EA
Min Order Qty
24

Profile® II Filter Cartridge

Product ID: ME3310FPN40H
Unit of Measure
12/EA
Min Order Qty
12

ME3310FPR40H 132

Product ID: ME3310FPR40H132
Unit of Measure
12/EA
Min Order Qty
12

RF-Style 1" Profile II 40µm

Product ID: R01F400
Unit of Measure
6/EA
Min Order Qty
6

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F005TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F010TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes
Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium product photo

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F100TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes
61 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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