Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

3 µm

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9020FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9600FRZ8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8314FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 inches

Product ID: HC9020FRZ4Z
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 13 inches

Product ID: HC9600FRZ13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8304FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 39 Inches

Product ID: HC8300FRZ39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRZ4Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Glass Fiber

Athalon Anti-Static Glass Fiber 3 micron (Beta 2000) Ethylene Propylene 13in 33.02cm length

Product ID: UE310AZ13J
Unit of Measure
15/EA
Min Order Qty
15
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Red1000 Anti-Static Glass Fiber 3 micron (Beta 1000) Nitrile 18in 45.72cm length

Product ID: HC2618FMZ18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Fluorocarbon 41in 104.14cm (REPLACED BY HCY09003FRZ41Z)

Product ID: HCY09003FKZ41Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCY090
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 3 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC0101FRZ18Z)

Product ID: HC0101FCZ18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
2.5 Micron, Beta 1000
See All Attributes

This product is currently not available. Please contact us for more information.

121 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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