Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Product Type

Filter Cartridges

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: R3F100-VIB
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
R type housing
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Discontinued

This part is no longer available. Please contact us for more information.

CTRG MCY PRFL STAR A010 J 1003

Product ID: MCY1003A010J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

WF4P05018H13

Product ID: WF4P05018H13
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F020H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II, Filter Cartridges, Polypropylene

Product ID: RM29F020H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Gasket / O-Ring Material
Santoprene
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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R2F150

Product ID: R2F150TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP20Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F020H21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
2 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches, Timonium

Product ID: R2F1200TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration
R type housing
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R2F020

Product ID: R2F020TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

RLS3FPS050

Product ID: RLS3FPS050
Unit of Measure
12/EA
Min Order Qty
12

Profile® II Filter Cartridge

Product ID: ME3310FPZ40H
Unit of Measure
12/EA
Min Order Qty
12
594 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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