Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: CLR540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches

Product ID: CLR550
Unit of Measure
20/EA
Min Order Qty
20
Length
127 cm / 50 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 19.5 inches

Product ID: CLR75195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: CLR5975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
5 micron
Claris, Polypropylene, 75 micron, 10 inch product photo

75um, 10", DOE

Product ID: CLR7510
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
75 micron
Claris, Polypropylene, 75 micron, 20 inch product photo

75um, 20", DOE

Product ID: CLR7520
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches

Product ID: CLR7540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches

Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
75 micron
Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron

WSFZ Top Centerpost Gasket

Product ID: PDC80102P
Unit of Measure
1/EA
Min Order Qty
1
901 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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