Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Featured product

false

Profile® II, FilterCartridges, Polypropylene, Length 30 Inches, EPDM, Polypropylene Endcaps

Product ID: AB3Y40018J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
EPDM
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

This product is currently not available. Please contact us for more information.

AB4Y30018J

Product ID: AB4Y30018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y10018J

Product ID: AB4Y10018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y10018H

Product ID: AB4Y10018H
Unit of Measure
12/EA
Min Order Qty
24

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9
Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3
See All Attributes

AB1Y0303J

Product ID: AB1Y0303JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB1Y0503J

Product ID: AB1Y0503JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB1W00325J

Product ID: AB1W00325J
Unit of Measure
1/EA
Min Order Qty
1

AB2P10018J

Product ID: AB2P10018JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P120018JDUP

Product ID: AB2P120018JDUP
Unit of Measure
1/EA
Min Order Qty
1

AB2P20018JDUP

Product ID: AB2P20018JDUP
Unit of Measure
1/EA
Min Order Qty
1
70 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English