Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Filters

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN330UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0230UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 30 Inches, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT04530UE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFNT1030UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Fluorocarbon Elastomer

Product ID: DFNT130UV
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® II, Filter Cartridges, Removal Rating 30 μm, Length 30 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: DFNT3030UVM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT130US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, FluorocarbonElastomer, SOE flat closed end external 222 O-rings

Product ID: DFPT0230EVM3562
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
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Duo-Fine®, Filter Cartridges, Length 30 Inches

Product ID: DFPT1130EFM3865
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
Change Out Differential Pressure
2.4 bard
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Duo-Fine®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, SOE fin end, external 222 O-rings

Product ID: DFPT330EFM8563
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M8
End Configuration
SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5) 3
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Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ENM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
M3
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Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: DFPT330ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)3
See All Attributes
207 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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