Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Gasket / O-Ring Material

Silicone

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR5040DOES36
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, silicone

Product ID: CLR5020DOES
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR5040M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR510DOES
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR510M7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: CLR520M3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR530DOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR540DOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: CLR540M3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR540M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 50 inches, silicone

Product ID: CLR550M3S815
Unit of Measure
308/EA
Min Order Qty
308
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
50 in
Cartridge Length (Metric)
1270 mm
Cartridge Length (Metric)
127 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches

Product ID: CLR7520DOES
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
184 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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