Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Type

Filter Cartridges

Gasket / O-Ring Material

EPDM

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, EPDM

Product ID: NXA3TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXA
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT32925UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT3010UEM3
Unit of Measure
30/EA
Min Order Qty
30
Micron
30 µm

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, Double Open Ended(DOE) with end caps and elastomer gaskets

Product ID: NXAQ510UDOEE12
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT210UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, EPDM, SOE fin end external 226 O-rings

Product ID: XLD320UEM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1.2 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT1210UEM3643
Unit of Measure
1/EA
Min Order Qty
1
Micron
1.2 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD7010UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT310UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA12030UM7E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT30975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, Single Open Ended with double O-ring bayonet lock and fin

Product ID: NXAQ510UM7E12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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244 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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