Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

EPDM

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT3020UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT3030UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT3040UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT3040UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT30975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT310UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT30975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT310UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings

Product ID: PFT30975UEM6
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT320UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial

Product ID: PFT320UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT330UE967
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
329 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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