Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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AB4P01018J

Product ID: AB4P01018J
Unit of Measure
12/EA
Min Order Qty
12

Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: ARD130UVM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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30" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGT30Z
Unit of Measure
12/EA
Min Order Qty
12

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

CLR 10-30 40

Product ID: CLR103040
Unit of Measure
24/EA
Min Order Qty
24

CLR 10-50-XK

Product ID: CLR1050XK
Unit of Measure
24/EA
Min Order Qty
24
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: CLR110
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
1 micron

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 19.5 inches

Product ID: CLR20195
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches, EPDM

Product ID: CLR3040M3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Claris, Polypropylene, 50 micron, 29.25 inch product photo

Claris, Polypropylene, 50 micron, 29.25 inch

Product ID: CLR502925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
50 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, DOE with elastomer gasket seals & end caps

Product ID: CLR520DOEE
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1
1,477 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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