Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

NXT 75-30U-1X product photo

NXT 75-30U-1X

Product ID: NXT7530U1X
Unit of Measure
12/EA
Min Order Qty
12

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP20Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F1200
Unit of Measure
24/EA
Min Order Qty
24
End Configuration
R type housing
Typical Flow Rate
< 1

CTRG PRFL HARD NYLON

Product ID: WK16B07HKBND
Unit of Measure
320/EA
Min Order Qty
320

49834716

Product ID: 49834716
Unit of Measure
24/EA
Min Order Qty
24

49834716

Product ID: 49834716TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
5EC4888389003 product photo

5EC4888389003 **use 5EC4888389003JTIM

Product ID: 5EC4888389003
Unit of Measure
1/EA
Min Order Qty
1

5EC4888389200J

Product ID: 5EC4888389200J
Unit of Measure
1/EA
Min Order Qty
1

5EC4888389400J

Product ID: 5EC4888389400J
Unit of Measure
1/EA
Min Order Qty
1

A-00562-2 249

Product ID: A005622249
Unit of Measure
10/EA
Min Order Qty
10

AB04P40018J

Product ID: AB04P40018JTIMMD
Unit of Measure
1/EA
Min Order Qty
1
1,477 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English