Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Product Use

Air, Gas, and Vent Filtration

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: CLR2040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
20 micron
Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end product photo

Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end

Product ID: AB05PFA2PVH4
Unit of Measure
1/EA
Min Order Qty
1
Sterilization Option(s)
Suitable for Autoclave or SIP
Filter Cartridge Style
Code 2
Cartridge Length (Metric)
127 mm
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AB1RK7J

Product ID: AB1RK7J
Unit of Measure
1/EA
Min Order Qty
1

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

Emflon® PFRW Filter Cartridge, AB1PFR8WH4

Product ID: AB1PFR8WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1

AB1UVI3EHF

Product ID: AB1UVI3EHF
Unit of Measure
1/EA
Min Order Qty
1

Oenopure™ Filter Cartridges, AB2GB7WH4

Product ID: AB2GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
1.2 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
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This product is currently not available. Please contact us for more information.

AB2M1002H1

Product ID: AB2M1002H1
Unit of Measure
1/EA
Min Order Qty
1

AB2RJ8J

Product ID: AB2RJ8J
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridge, AB3A0157WH4

Product ID: AB3A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star Filter Cartridge, AB3A1007WH4

Product ID: AB3A1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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49 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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