Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Air, Gas, and Vent Filtration

Emflon® II Membrane in Kleenpak™ Capsules serves the user's specific systematic needs. Pall offers options including gama-irradiatable, pre-sterilized and custom-made sets. All versions perform to the same top quality standard. Each unit is fully integrity testable and has the highly retentive Emflon II membrane. These capsule filters provide high air flows of both air and gas.

9 Products In Family

Emflon® PFR Membrane in Novasip™ Capsules have lower installation costs than comparable systems. Its steam sterilizing durability provides a long service life and low maintenance costs. Novasip™ filters use polyethermide because of its strong withstanding features against elevated temperature and pressure. Designed with air and vent applications Novasip™ filters can be used in a range of operating conditions.

SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II EK 1 200XEK1S232SP product photo

SUPRAdisc SD II EK 1 200XEK1S232SP

Product ID: 7005243
Unit of Measure
1/STK
Min Order Qty
1

SUPRAdisc SD II 300 200X300S232SP

Product ID: 7005291
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II EK 1 200XEK1C440SP

Product ID: 7007249
Unit of Measure
1/STK
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

7007323 product photo

SUPRAdisc SD II 300 200X300C440SP

Product ID: 7007323
Unit of Measure
1/EA
Min Order Qty
1
Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end product photo

Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end

Product ID: AB05PFA2PVH4
Unit of Measure
1/EA
Min Order Qty
1
Sterilization Option(s)
Suitable for Autoclave or SIP
Filter Cartridge Style
Code 2
Cartridge Length (Metric)
127 mm
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Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

AB1RK7J

Product ID: AB1RK7J
Unit of Measure
1/EA
Min Order Qty
1

AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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