Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Cartridge Length (Metric)

248 mm

Product Use

Pre-Filtration

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT045975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 226 O-rings

Product ID: PFT10975UEM6
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA05975UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT045975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT10975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: CLR30975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
30 micron
NXT 150-9.75U-H21 product photo

Nexis, NXT, 150 μm, 24.8 cm (9.75 in), DOE, Santoprene gasket seal

Product ID: NXT150975UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT30975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA5975U
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches

Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
75 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 9.75 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 9.75 Inches, Nitrile

Product ID: PFT2975UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT3975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
29 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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