PhotoKleen™ EZD-3XL Filter Capsules product photo Primary L

PhotoKleen™ EZD-3XL Filter Capsules

The PhotoKleen™ EZD-3XL filter is designed for smallvolume dispense systems to meet the requirements of advanced high through-put track systems. The PhotoKleen™ EZD-3XL filter has almost double the filter area (compared to the PhotoKleen™ EZD-3X filter), allowing for lower pressure drop during filtration. Two filter media – Asymmetric Nylon 6,6 and HDPE – are available. The naturally hydrophilic Nylon 6,6 membrane allows for spontaneous wettability, and offers lower defectivity on patterned wafers. The XP option is available for advanced lithography processes.

  • Double the filter area compared to PhotoKleen™ EZD-3X filter capsule
  • Easy change out capsule style filter assembly
  • Two membrane material types available
  • Minimized hold-up volume, and top in / top out flow direction
  • Offers lower pressure drop for higher viscosity fluids
  • Reduces tool down time by extending filter change-outs
  • Offers suitable membranes for target applications
  • Minimized organic extractables by XP option for rapid start-up and reducing chemical waste
  • XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.


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Description

The PhotoKleen™ EZD-3XL filter is designed for smallvolume dispense systems to meet the requirements of advanced high through-put track systems. The PhotoKleen™ EZD-3XL filter has almost double the filter area (compared to the PhotoKleen™ EZD-3X filter), allowing for lower pressure drop during filtration. Two filter media – Asymmetric Nylon 6,6 and HDPE – are available. The naturally hydrophilic Nylon 6,6 membrane allows for spontaneous wettability, and offers lower defectivity on patterned wafers. The XP option is available for advanced lithography processes.

  • Double the filter area compared to PhotoKleen™ EZD-3X filter capsule
  • Easy change out capsule style filter assembly
  • Two membrane material types available
  • Minimized hold-up volume, and top in / top out flow direction
  • Offers lower pressure drop for higher viscosity fluids
  • Reduces tool down time by extending filter change-outs
  • Offers suitable membranes for target applications
  • Minimized organic extractables by XP option for rapid start-up and reducing chemical waste
  • XP option guarantees low organic, metal and particle cleanliness for the most advanced processes.
Specifications

Materials of Construction

Components Materials
Filter Media P-Nylon : Hydrophilic Asymmetric Nylon 6,6
PE-Kleen: High Density Polyethylene (HDPE)
Support and Drainage High Density Polyethylene (HDPE)
Core, Cage, and End Caps High Density Polyethylene (HDPE)
Housing High Density Polyethylene (HDPE)
O-ring Kalrez1
Removal Ratings P-Nylon : 2 nm, 5 nm, 10 nm, 20 nm, 40 nm
PE-Kleen : 2 nm, 5 nm, 10 nm, 30 nm, 50 nm
Filter Area P-Nylon : 2 nm: 3,200 cm2,
5 nm :2,100 cm2
10, 20, 40 nm : 2,500 cm2
PE-Kleen : 2, 5, 10, 30 nm : 2,800 cm2
50 nm : 2,900 cm2
Maximum Forward Differential Pressure P-Nylon : 0.27 MPa @ 20 °C / 39 psid @ 60 °F
PE-Kleen : 0.29 MPa @ 30 °C / 42 psid @ 86 °F
Maximum Operating Temperature 30 °C / 86 °F
Maximum Operating Pressure 0.29 MPaG @ 30 °C / 42 psig @ 86 °F

1 Kalrez is a registered trademark of DuPont Performance Elastomers

Dimensions 2



2 PhotoKleen™ EZD-3XL filter capsule requires PhotoKleen EZD-3XL head manifold
Performance

Typical Flow Characteristics - 1cP fluid, 20℃


Type
Filter Capsules
Ordering Information

PHD13 [1] EH11B3


Table 1

Code Filter Media Removal Ratings
XN2L4 P-Nylon Asymmetric 6,6 2 nm
HXN54 Asymmetric Nylon6,6 5 nm
AN01 Asymmetric Nylon6,6 10 nm
ANM Asymmetric Nylon6,6 20 nm
AND Asymmetric Nylon6,6 40 nm
UG2 PE-Kleen HDPE 2 nm
UG5 HDPE 5nm
UG001 HDPE 10 nm
UG003 HDPE 30 nm
UG005 HDPE 50 nm
3 For XP option add –XP to end of part number for 10nm / 20nm removal ratings.
4 XP treatment is standard on 2nm / 5 nm removal rating.

Specifications (Head Manifold)

Materials of Construction
Components Materials
Head PFA / HDPE
Fitting PFA / PCTFE
Stage and lever SUS304
Adapter SUS304

Connections
Type Inlet / Outlet Vent
Flowell5 60 series 1/4” (6.35 x 4.3 mm) Fitting 4 x 3 mm Fitting
5 x 3 mm Fitting 5 x 3 mm Fitting
5 Flowell is a trademark of Flowell Co.,Ltd.

Part Numbers / Ordering Infomation (Head Manifold)

Part Number Inlet / Outlet Vent
PHF13GFS44MWLTA 1/4” (6.35 x 4.3 mm) Flowell 60 Fitting 4 x 3 mm Flowell 60 Fitting
PHF13GFS55MLTA 5 x 3 mm Flowell 60 Fitting 5 x 3 mm Flowell 60 Fitting

Optional Parts

Product Name Part Number Notes
Adapter PTH9101 For the placement of other capsules
PhotoKleen EZD-3
PhotoKleen EZD-3X
Dummy Capsules (PHDC12H11B, PHDC12H11B-XP+)
Dummy Capsule PHDC12H11B O-ring : Kalrez
PHDC12H11B-XP+ O-ring : Kalrez, Special Clean Product


Dimensions

Application
Photolithography