Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Industrial Manufacturing

FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 16 inches

Product ID: HC9600FRP16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 39 Inches

Product ID: HC8900FRS39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 18 Inches

Product ID: HC2296FRT18H50
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: HC9650FRN16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRT4Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: HC9100FRS13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 16 inches

Product ID: HC9650FRP16Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 39 Inches

Product ID: HC8314FRP39Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 4 Inches

Product ID: HC7400SRS4Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 8 inches

Product ID: HC9800FRP8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 39 Inches

Product ID: HC8904FRN39Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 8 inches

Product ID: HC9600FRT8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
25 µm
Membrane Material
Glass Fiber
4,618 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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