Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

13" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP13Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN13Z
Unit of Measure
12/EA
Min Order Qty
24

40" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN40H
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridge

Product ID: HC3310FGN13H
Unit of Measure
1/EA
Min Order Qty
1

13" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGS13Z
Unit of Measure
24/EA
Min Order Qty
24

Profile® II Filter Cartridge

Product ID: HC3310FGR13Z
Unit of Measure
1/EA
Min Order Qty
1

PROFILE

Product ID: HC3310FGR40Z
Unit of Measure
1/EA
Min Order Qty
1

40" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP40Z
Unit of Measure
12/EA
Min Order Qty
24

CTRG PROFILE PIH 20" 400 NYLON E/C

Product ID: HC3310FGR20Z
Unit of Measure
12/EA
Min Order Qty
24

30" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP30Z
Unit of Measure
12/EA
Min Order Qty
12

Profile® II Nylon Filter Cartridge

Product ID: HC3310FGN30Z
Unit of Measure
1/EA
Min Order Qty
1

30" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGS30Z
Unit of Measure
12/EA
Min Order Qty
12
464 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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