Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches

Product ID: R4F200
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches, Timonium

Product ID: R4F400TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
End Configuration
R type housing
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Profile® II, Filter Cartridges, Polypropylene, Length 40 Inches

Product ID: R4F400
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
End Configuration
R type housing
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R4F700

Product ID: R4F700TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CTRG PROFILE RGY1FN 200

Product ID: RGY1FN200
Unit of Measure
1/EA
Min Order Qty
1

RF 30" Profile Nylon 70µm

Product ID: RGY3FN700
Unit of Measure
1/EA
Min Order Qty
1

RF-Style 30" Profile Nylon 40µm

Product ID: RGY3F400
Unit of Measure
1/EA
Min Order Qty
1

RF 30" Profile Nylon 40µm

Product ID: RGY3FN400
Unit of Measure
1/EA
Min Order Qty
1

RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

RLS2FPS700

Product ID: RLS2FPS700
Unit of Measure
12/EA
Min Order Qty
12

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F002H21NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F003H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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464 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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