Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: RM1F003H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

RM2F007H21-COA

Product ID: RM2F007H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F003H21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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RM2F050H21-COA

Product ID: RM2F050H21COATIMMD
Unit of Measure
1/EA
Min Order Qty
1

RM3F300H21

Product ID: RM3F300H21TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
RT001A10A product photo

RT001A10A

Product ID: RT001A10A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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CRTG SLK7001BC product photo

CRTG SLK7001BC

Product ID: SLK7001BC
Unit of Measure
1/EA
Min Order Qty
1
SHELL ASSY LMOVS20S product photo

SHELL ASSY LMOVS20S

Product ID: SHELLASSYLMOVS20S
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

T010A10Y product photo

T010A10Y

Product ID: T010A10Y
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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T025BB30Y-M3 product photo

T025BB30Y-M3

Product ID: T025BB30YM3
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
T010BB20Y-M3 product photo

T010BB20Y-M3

Product ID: T010BB20YM3
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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444 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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