Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

SUPRAdisc SD II 50 200X050C440SP product photo

SUPRAdisc SD II 50 200X050C440SP

Product ID: 7007253
Unit of Measure
1/EA
Min Order Qty
1
SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1
SM Kö 3-5 abgepackt in Säcken a 25kg product photo

SM Kö 3-5 abgepackt in Säcken a 25kg

Product ID: 89582194
Unit of Measure
1/KG
Min Order Qty
1

ELEMENT

Product ID: ACA530F25
Unit of Measure
1/EA
Min Order Qty
1
Family
-

Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 m. SB

Product ID: B04999
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 m. SB

Product ID: B05021
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 o. SB

Product ID: B04994
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 o. SB

Product ID: B05022
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

AquaSep XS L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level, 11μm Beta 5000 solids removal rating

Product ID: LCS06PXSH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
140 °F
Maximum Operating Temperature (C)
60 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

AquaSep EL L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2ELBH
Unit of Measure
4/EA
Min Order Qty
4
Maximum Operating Temperature (F)
140 °F
Maximum Operating Temperature (C)
60 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

AquaSep EL L/L Coalescer, 6in length, 2.75in diameter, ≤15ppm separation level, 24μm Beta 50 solids removal rating

Product ID: LCS06ELBH
Unit of Measure
4/EA
Min Order Qty
4
Maximum Operating Temperature (F)
140 °F
Maximum Operating Temperature (C)
60 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

LCMEH

Product ID: LCMEH
Unit of Measure
1/EA
Min Order Qty
1
9,533 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English